Title :
One-chip quartz crystal oscillator using a direct-bonding technique of quartz crystal onto silicon
Author :
Eda, Kazuo ; Ogura, Tetsuyoshi ; Tomita, Yoshihiro ; Taguchi, Yutaka
fDate :
Oct. 31 1994-Nov. 3 1994
Abstract :
A one-chip quartz crystal oscillator (XO) using a novel fabrication method to bond directly quartz crystal onto silicon (QOS) without any adhesive, is reported together with its fabrication process, microstructure of the bonded interface, and electro-acoustic characteristics
Keywords :
VHF oscillators; analogue integrated circuits; crystal oscillators; microassembling; monolithic integrated circuits; quartz; 40 to 50 MHz; Si; SiO2-Si; bonded interface microstructure; direct-bonding technique; electro-acoustic characteristics; fabrication method; monolithic oscillator; quartz crystal; quartz crystal oscillator; Analog integrated circuits; Bonding; Monolithic integrated circuits; Piezoelectric resonator oscillators; Quartz materials/devices; VHF oscillators;
Conference_Titel :
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location :
Cannes, France
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1994.401714
