Author_Institution :
Nat. Res. Center for Photonic Integration Technol., INHA Univ., Incheon, South Korea
Abstract :
This paper presents an overview of our work on the design, fabrication, and integration of micro/nano-scale optical devices as applicable for all-optical generic and application-specific VLSI photonic integration. The micro/nano-optical devices are designed to perform the functions of collecting, storing, transporting, processing, switching, routing, and distributing optical signals on chips. The integrated optical components include micro/nano-scale optical waveguides, switches, modulators, sensors, directional couplers, multi-mode interference devices, micro-ring resonators, photonic crystal devices, and plasmonic devices made of polymer, silicon and semiconductor materials. The paper discusses scientific and engineering issues of miniaturizing and integrating micro/nano-scale photonic devices of small and ultra-small dimensions to a very large scale integration density as applicable for specific functions. Scientific and engineering issues are examined and some examples of progresses are presented.
Keywords :
VLSI; integrated circuit design; integrated optics; nanoelectronics; VLSI photonics; high-density photonic circuit integration; integrated optical components; micro-scale optical devices; nano-scale optical devices; optical directional couplers; optical micro-ring resonators; optical modulators; optical multi-mode interference devices; optical sensors; optical switches; optical waveguides; photonic crystal devices; plasmonic devices; polymer materials; semiconductor materials; silicon materials; Circuits; Nanoscale devices; Optical design; Optical devices; Optical modulation; Optical polymers; Optical resonators; Optical sensors; Photonics; Very large scale integration; microphotonics; nanophotonics; photonic circuits; photonic integration;
