Title :
Biochemical sensing with an arrayed silicon nanowire platform
Author :
Ravindran, R. ; Sadie, J.A. ; Scarberry, K.E. ; Yang, H.S. ; Bakir, M.S. ; McDonald, J.F. ; Meindl, J.D.
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
In this paper, we present our vision of a highly scalable arrayed biochemical sensor platform. This platform combines the advantages of refined and entrenched technologies like top-down integrated circuit fabrication and clinical assays with emerging technologies like three-dimensional stacking and label-free sensing. We demonstrate fabrication concepts and preliminary sensing results on ovarian cell lines prior to engaging in a discussion about relevant applications with regard to the exciting recent advances in genomics and oncology.
Keywords :
CMOS integrated circuits; biochemistry; biomedical electronics; biomedical materials; biosensors; cancer; cellular biophysics; genomics; nanobiotechnology; nanofabrication; nanowires; optical images; polymers; scanning electron microscopy; silicon; stacking; tumours; Si; arrayed silicon nanowire; biochemical sensor; clinical assay; genomics; label-free sensing; oncology; ovarian cell line; three-dimensional stacking; top-down integrated circuit fabrication; Acoustic sensors; Biosensors; Electrodes; Fabrication; Integrated circuit technology; Optical sensors; Sensor arrays; Silicon; Stacking; Testing;
Conference_Titel :
Electronic Components and Technology Conference (ECTC), 2010 Proceedings 60th
Conference_Location :
Las Vegas, NV
Print_ISBN :
978-1-4244-6410-4
Electronic_ISBN :
0569-5503
DOI :
10.1109/ECTC.2010.5490826
