DocumentCode
2732010
Title
Stable and Reliable Q-Factor in Resonant MEMS with Getter Film
Author
Longoni, G. ; Conte, A. ; Moraja, M. ; Fourrier, A.
Author_Institution
SAES Getters, Lainate
fYear
2006
fDate
26-30 March 2006
Firstpage
416
Lastpage
420
Abstract
The objective of this work was to show that the Q-factor of MEMS resonators can be increased and stabilized with the use of getters
Keywords
Q-factor; bonding processes; electronics packaging; micromechanical resonators; reliability; MEMS resonators; Q-factor; getter film; vacuum bonding; vacuum packaging; Gettering; Hermetic seals; Microelectromechanical devices; Micromechanical devices; Optical sensors; Packaging; Q factor; Resonance; Vacuum technology; Wafer scale integration; MEMS; Q-factor; getter; vacuum bonding; vacuum packaging;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium Proceedings, 2006. 44th Annual., IEEE International
Conference_Location
San Jose, CA
Print_ISBN
0-7803-9498-4
Electronic_ISBN
0-7803-9499-2
Type
conf
DOI
10.1109/RELPHY.2006.251254
Filename
4017195
Link To Document