Title :
Stable and Reliable Q-Factor in Resonant MEMS with Getter Film
Author :
Longoni, G. ; Conte, A. ; Moraja, M. ; Fourrier, A.
Author_Institution :
SAES Getters, Lainate
Abstract :
The objective of this work was to show that the Q-factor of MEMS resonators can be increased and stabilized with the use of getters
Keywords :
Q-factor; bonding processes; electronics packaging; micromechanical resonators; reliability; MEMS resonators; Q-factor; getter film; vacuum bonding; vacuum packaging; Gettering; Hermetic seals; Microelectromechanical devices; Micromechanical devices; Optical sensors; Packaging; Q factor; Resonance; Vacuum technology; Wafer scale integration; MEMS; Q-factor; getter; vacuum bonding; vacuum packaging;
Conference_Titel :
Reliability Physics Symposium Proceedings, 2006. 44th Annual., IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9498-4
Electronic_ISBN :
0-7803-9499-2
DOI :
10.1109/RELPHY.2006.251254
