Title :
Monolithic integration of III–V devices with silicon photonics on a modified SOI platform
Author :
Yourui Huangfu ; Wenxiong Wei ; Chen Qiu ; Qinfen Hao
Author_Institution :
Shannon Lab., Huawei Technol. Co., Ltd., Hangzhou, China
Abstract :
We propose that monolithic integration of defect-free III-V on Si can be achieved with sub-20nm nano-patterned substrate. A novel SOI structure is modified for realizing this integration in low cost and high yield.
Keywords :
III-V semiconductors; elemental semiconductors; integrated optics; monolithic integrated circuits; nanopatterning; nanophotonics; optical interconnections; silicon; silicon-on-insulator; III-V devices; Si; modified SOI platform; monolithic integration; nanopatterned substrate; optical interconnection; silicon photonics; silicon-on-insulator;
Conference_Titel :
Optical Interconnects Conference (OI), 2015 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4799-8178-6
DOI :
10.1109/OIC.2015.7115687
