Temperature Dependence of Endurance Characteristics in NOR Flash Memory Cells

A temperature dependence of endurance characteristics in NOR flash cells is presented. The window closing is accelerated after 100 K cycling due to a degraded programming speed at 85 degC compared to that measured at 25 degC. At 25 degC, both oxide traps and interface traps reduce program and erase speeds, while at 85 degC the effects of interface traps generated at the drain overlap region become increased, interrupting the hot electron injection during program operation. Two processing conditions including growth condition of tunnel oxide and the type of passivation layer are found to be related to the degradation of endurance