Title :
Degradation Mechanism in Low-Temperature P-Channel Polycrystalline Silicon TFTs Under Dynamic Stress
Author :
Toyota, Y. ; Matsumura, M. ; Hatano, M. ; Shiba, T. ; Ohkura, M.
Author_Institution :
Central Res. Lab., Hitachi Ltd., Tokyo
Abstract :
Pronounced device degradation and temperature dependence of p-channel polycrystalline silicon thin-film transistors (polysilicon TFTs) under dynamic stress were investigated. This device degradation is due to the trap states produced by repetition between electron injection and hole injection. The degradation is strongly dependent on the number of trapped holes and the location of the hole-injection region. The analysis of activation energy affirms that the rapid degradation at high temperature is caused by an increase in the number of trapped holes, to which the negative-bias-temperature stress significantly contributes
Keywords :
electron traps; hole traps; semiconductor device reliability; silicon; stress effects; thin film transistors; Si; device degradation; dynamic stress; electron injection; hole injection; hole-injection region; negative-bias-temperature; p-channel polycrystalline silicon TFT; temperature dependence; thin-film transistors; trap states; trapped holes; Charge carrier processes; Degradation; Displays; Electron traps; Laboratories; Silicon; Spontaneous emission; Stress; Temperature dependence; Thin film transistors;
Conference_Titel :
Reliability Physics Symposium Proceedings, 2006. 44th Annual., IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9498-4
Electronic_ISBN :
0-7803-9499-2
DOI :
10.1109/RELPHY.2006.251346