Title :
MEMS Extended Tuning Range Varactor-Based True Time Delay Line Technology
Author :
Liang, Yaping ; Domier, C.W. ; Luhmann, N.C., Jr.
Author_Institution :
UC Davis, Davis
Abstract :
Novel RF-MEMS extended tuning range varactors are being developed for incorporation in arrays of RF MEMS based true time delay lines for use in millimeter-wave Phased Antenna Array (PAA) systems. A frequency of 28 GHz (Ka-Band) has been selected for the activity since it is a frequency region of considerable commercial, scientific, and military interest as well as being sufficiently high to result in small size units. The design of the 28 GHz proof-of-principle RF MEMS varactor based true time delay line is presented together with the fabrication process and the initial measurement results.
Keywords :
delays; micromechanical devices; millimetre wave antenna arrays; tuning; varactors; PAA; RF MEMS; millimeter-wave phased antenna array; time delay line technology; tuning range varactor; Antenna arrays; Delay effects; Fabrication; Frequency; Micromechanical devices; Millimeter wave technology; Phased arrays; Radiofrequency microelectromechanical systems; Tuning; Varactors;
Conference_Titel :
Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, 2006. IRMMW-THz 2006. Joint 31st International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0400-2
Electronic_ISBN :
1-4244-0400-2
DOI :
10.1109/ICIMW.2006.368248
