Title :
RF-sputtered ITO and ITO:Zr studied by in situ spectroscopic ellipsometry
Author :
Burst, James M. ; Peshek, Timothy J. ; Gessert, Timothy A. ; Coutts, Timothy J. ; Li, Xiaonan ; Levi, Dean ; Weiss, Sharon M. ; Rogers, Bridget R.
Author_Institution :
Nat. Center for Photovoltaics, Nat. Renewable Energy Lab., Golden, CO, USA
Abstract :
We report results from in situ real-time spectroscopic ellipsometry (RT-SE) investigations into the sputter deposition and subsequent annealing behavior of permittivity-engineered transparent conductive oxide (TCO) films. RT-SE reveals information about the growth dynamics and evolution of the films´ electro-optical properties during deposition. We investigate the correlations of the ex situ optical and electrical measurements with structural analysis for select films.
Keywords :
annealing; ellipsometry; sputter deposition; zirconium; ITO:Zr; RF sputtering; growth dynamics; in situ spectroscopic ellipsometry; sputter deposition; transparent conductive oxide films; Conductivity; Indium tin oxide; Optical films; Optical scattering; Sputtering; Substrates;
Conference_Titel :
Photovoltaic Specialists Conference (PVSC), 2010 35th IEEE
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-5890-5
DOI :
10.1109/PVSC.2010.5614289
