DocumentCode
2735820
Title
Interface circuit for capacitive microaccelerometer
Author
Liu, Minjie ; Zhang, Gang ; Dong, Jingxin ; Zhao, Changde
Author_Institution
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing
fYear
2008
fDate
10-13 Aug. 2008
Firstpage
654
Lastpage
657
Abstract
This paper reports an interface circuit that provides an interface from capacitive MEMS sensors to other signal processing circuits. The interface circuit designed specially for capacitive accelerometer and gyroscopes applications is implemented in 0.35-mum 2P-4M CMOS process and measurement results that indicate the interface circuit resolves 7.3 aF of capacitance with a 1 MHz sampling rate and has a rough noise floor of 0.2 aF/Hz@1 KHz at ambient atmosphere are presented.
Keywords
CMOS integrated circuits; accelerometers; capacitive sensors; microsensors; capacitance 7.3 aF; capacitive MEMS sensors; capacitive accelerometer; capacitive microaccelerometer; frequency 1 MHz; frequency 1 kHz; gyroscopes applications; interface circuit; signal processing circuits; size 0.35 micron; Accelerometers; Atmospheric measurements; CMOS process; Capacitance measurement; Capacitive sensors; Circuits; Gyroscopes; Micromechanical devices; Noise measurement; Signal processing;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 2008. MWSCAS 2008. 51st Midwest Symposium on
Conference_Location
Knoxville, TN
ISSN
1548-3746
Print_ISBN
978-1-4244-2166-4
Electronic_ISBN
1548-3746
Type
conf
DOI
10.1109/MWSCAS.2008.4616884
Filename
4616884
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