Title :
UV photodetectors from B-doped diamond film
Author :
Thaiyotin, L. ; Phetchakul, T. ; Cheirsirikul, S. ; Supadech, S.
Author_Institution :
Fac. of Eng., King Mongkut´´s Inst. of Technol., Bangkok, Thailand
Abstract :
The diamond film synthesized on silicon substrate by hot-filament CVD has been used to fabricate photoconductive and photodiode structures for the detection of UV light. The photoconductive device which the higher boron doped has a greater different response between UV light and visible light more than the lower one, but it has more dark current and response time. The Al Schottky photodiode fabricated on the B-doped diamond film showed lower dark current and shorter response time than photoconductive device
Keywords :
CVD coatings; boron; diamond; elemental semiconductors; photoconducting devices; photodetectors; photodiodes; semiconductor thin films; ultraviolet detectors; Al Schottky photodiode; C:B; C:B-Al; UV photodetector; boron doped diamond film; dark current; hot filament CVD; photoconductive device; response time; silicon substrate; Boron; Dark current; Delay; Photoconducting devices; Photoconductivity; Photodetectors; Photodiodes; Semiconductor films; Silicon; Substrates;
Conference_Titel :
TENCON 2000. Proceedings
Conference_Location :
Kuala Lumpur
Print_ISBN :
0-7803-6355-8
DOI :
10.1109/TENCON.2000.892263
