Title :
Diffraction compensation in SAW filters
Author :
Seifert, F. ; Visintini, G. ; Ruppel, C.C.W. ; Riha, G.
Author_Institution :
Tech. Univ. Wien, Vienna, Austria
Abstract :
A review of diffraction analysis and compensation methods for surface acoustic wave (SAW) devices is given. The diffraction effect on different SAW devices is discussed, analyzing the two-dimensional SAW potential distribution in simulations, and measurements done with a scanning electron microscope and with a laser probe. The state-of-the-art wideband compensation method is outlined for the cases of bandpass filters and delay lines. Examples demonstrate the achieved accuracy in SAW devices
Keywords :
band-pass filters; compensation; reviews; surface acoustic wave filters; transfer functions; ultrasonic delay lines; ultrasonic diffraction; SAW filters; bandpass filters; delay lines; diffraction analysis; diffraction compensation; laser probe; review; scanning electron microscope; transfer function; two-dimensional SAW potential distribution; wideband compensation method; Acoustic diffraction; Acoustic measurements; Acoustic waves; Analytical models; Probes; SAW filters; Scanning electron microscopy; Surface acoustic wave devices; Surface acoustic waves; Wideband;
Conference_Titel :
Ultrasonics Symposium, 1990. Proceedings., IEEE 1990
Conference_Location :
Honolulu, HI
DOI :
10.1109/ULTSYM.1990.171328
