DocumentCode :
2736485
Title :
One-step selective growth of GaAs on V-groove patterned GaAs substrates using CBr4 and CCl4
Author :
Kim, Eun Kyu ; Kim, Tae-Geun ; Son, Chang-Sik ; Kim, Seong-II ; Park, Young K. ; Kim, Yong ; Min, Suk-Ki ; Choi, In-Hoon
Author_Institution :
Semicond. Mater. Res. Center, Korea Inst. of Sci. & Technol., Seoul, South Korea
fYear :
1997
fDate :
8-11 Sep 1997
Firstpage :
151
Lastpage :
154
Abstract :
With carbon tetrabromide (CBr4) and carbon tetrachloride (CCl4) supplied, well-defined selective GaAs epilayers were successfully grown on V-groove and mesa patterned GaAs substrates by one-step atmospheric pressure metalorganic chemical vapor deposition. It appeared that the selectivity of the grown epilayers showing huge lateral growth rate enhancement depended on supplying gases. Inside a V-groove, the selectively grown GaAs epilayers exhibited a triangular and a round shape with supplying CBr4 and CCl 4, respectively. The selective growth was also done on the side walls of a mesa. In contrast, no growth was observed outside V-groove and on the top of the mesa. This kind of selective epitaxial technology has promising features for well-defined quantum structures and lateral p-n junction
Keywords :
III-V semiconductors; gallium arsenide; semiconductor epitaxial layers; semiconductor growth; vapour phase epitaxial growth; GaAs; MOCVD epitaxial growth; V-groove patterned substrates; carbon tetrabromide; carbon tetrachloride; lateral growth rate enhancement; mesa patterned substrates; metalorganic chemical vapor deposition; one-step selective growth; round shape; selective epilayers; triangular shape; Chemical technology; Epitaxial growth; Gallium arsenide; Gases; Lithography; MOCVD; Materials science and technology; Radiofrequency interference; Substrates; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Compound Semiconductors, 1997 IEEE International Symposium on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7503-0556-8
Type :
conf
DOI :
10.1109/ISCS.1998.711602
Filename :
711602
Link To Document :
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