Title :
The Fabrication of THz Photonic Filters Using Ultraviolet Based SU8 Micromachining
Author :
Gallant, A.J. ; Levitt, J.A. ; Swift, G.P. ; Dai, D.C. ; Kaliteevski, M. ; Wood, D. ; Petty, M.C. ; Chamberlain, J.M.
Author_Institution :
Durham Univ., Durham
Abstract :
Here we report on the development of an ultraviolet (UV) based exposure technique for the fabrication of high aspect ratio metallic pillar arrays. These arrays act as photonic band gap based filters. Completed structures show a relative transmission of up to 97% in the main pass band centred at 1.25 THz.
Keywords :
band-pass filters; micromachining; photonic band gap; submillimetre wave filters; THz photonic filter fabrication; frequency 1.25 THz; high aspect ratio metallic pillar arrays; pass band filter; photonic band gap; ultraviolet based SU8 micromachining; Band pass filters; Delamination; Glass; Gold; Micromachining; Optical device fabrication; Photonic band gap; Physics; Resists; Submillimeter wave filters;
Conference_Titel :
Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, 2006. IRMMW-THz 2006. Joint 31st International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0400-2
Electronic_ISBN :
1-4244-0400-2
DOI :
10.1109/ICIMW.2006.368402
