DocumentCode
2737781
Title
CAESAR: a virtual IC factory in an undergraduate semiconductor device fabrication laboratory
Author
Asenov, A. ; Stanley, C.R.
Author_Institution
Dept. of Electron. & Electr. Eng., Glasgow Univ., UK
fYear
1995
fDate
34792
Firstpage
42644
Lastpage
42649
Abstract
In this paper we have summarised our experiences from the introduction of process and device simulation within the CAESAR framework into an undergraduate semiconductor device fabrication laboratory. We have found that this innovative step is well received by the students. The simulations benefit them in the learning process and provide practical experience and confidence in using simulation tools
Keywords
CAD; electronic engineering education; semiconductor device models; semiconductor process modelling; student experiments; CAESAR; TCAD; device simulation; process simulation; semiconductor device fabrication; undergraduate laboratory; virtual IC factory;
fLanguage
English
Publisher
iet
Conference_Titel
Physical Modelling of Semiconductor Devices, IEE Colloquium on
Conference_Location
London
Type
conf
DOI
10.1049/ic:19950435
Filename
478373
Link To Document