DocumentCode
2737911
Title
A Novel Scanning Probe Array with Multiple Tip Sharpness for Variable-Resolution Scanning Probe Lithography Applications
Author
Yapici, Murat Kaya ; Zou, Jun
Author_Institution
Dept. of Electr. & Comput. Eng., Texas A&M Univ., College Station, TX
fYear
2008
fDate
18-21 Aug. 2008
Firstpage
147
Lastpage
150
Abstract
We report the development and application of a novel scanning probe array that consists of "blunt" and "sharp" tips with precisely defined contact areas. A new micromachining process based on SOI (silicon-on-insulator) substrates has been successfully developed to enable the fabrication of the scanning probe array. To demonstrate its capability for variable-resolution scanning probe lithography, the scanning probe array has been used to simultaneously generate fluorescent patterns with different linewidths in a parallel mode.
Keywords
fluorescence; gold; micromachining; micromechanical devices; nanolithography; probes; scanning probe microscopy; Au; SOI substrate; Si; blunt tip; fluorescent patterns; gold scanning probe array; micromachining process; sharp tip; variable-resolution scanning probe lithography; Application software; Atomic force microscopy; Contacts; Etching; Fabrication; Fluorescence; Lithography; Micromachining; Probes; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2008. NANO '08. 8th IEEE Conference on
Conference_Location
Arlington, TX
Print_ISBN
978-1-4244-2103-9
Electronic_ISBN
978-1-4244-2104-6
Type
conf
DOI
10.1109/NANO.2008.50
Filename
4617032
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