Title :
A Novel Scanning Probe Array with Multiple Tip Sharpness for Variable-Resolution Scanning Probe Lithography Applications
Author :
Yapici, Murat Kaya ; Zou, Jun
Author_Institution :
Dept. of Electr. & Comput. Eng., Texas A&M Univ., College Station, TX
Abstract :
We report the development and application of a novel scanning probe array that consists of "blunt" and "sharp" tips with precisely defined contact areas. A new micromachining process based on SOI (silicon-on-insulator) substrates has been successfully developed to enable the fabrication of the scanning probe array. To demonstrate its capability for variable-resolution scanning probe lithography, the scanning probe array has been used to simultaneously generate fluorescent patterns with different linewidths in a parallel mode.
Keywords :
fluorescence; gold; micromachining; micromechanical devices; nanolithography; probes; scanning probe microscopy; Au; SOI substrate; Si; blunt tip; fluorescent patterns; gold scanning probe array; micromachining process; sharp tip; variable-resolution scanning probe lithography; Application software; Atomic force microscopy; Contacts; Etching; Fabrication; Fluorescence; Lithography; Micromachining; Probes; Silicon;
Conference_Titel :
Nanotechnology, 2008. NANO '08. 8th IEEE Conference on
Conference_Location :
Arlington, TX
Print_ISBN :
978-1-4244-2103-9
Electronic_ISBN :
978-1-4244-2104-6
DOI :
10.1109/NANO.2008.50
