• DocumentCode
    2737964
  • Title

    Growth of Feature-Controlled ZnO Nanotube Arrays by Using Patterned Apertures with Hydrothermal Method

  • Author

    Chao, Cha-Hsin ; Huang, Jing-Shun ; Lin, Ching-Fuh

  • Author_Institution
    Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei
  • fYear
    2008
  • fDate
    18-21 Aug. 2008
  • Firstpage
    157
  • Lastpage
    160
  • Abstract
    ZnO nanotube arrays with controlled diameter and density were synthesized on ZnO/Si substrate with thereon two-dimensional periodic polymer aperture arrays at low temperature. The growth behavior of the ZnO nanotube arrays was found to be strongly dependent on the opening of the aperture. An obvious size and density variation of ZnO nanotube arrays with the size of aperture was observed. The detailed growth behavior was characterized and analyzed in this research. This investigation offers a capability to control the formation of single/multiple ZnO nanotube(s) with both size and density onto random substrates for potential optoelectronics applications.
  • Keywords
    II-VI semiconductors; electron beam lithography; nanolithography; nanopatterning; nanotubes; polymers; semiconductor growth; wide band gap semiconductors; zinc compounds; ZnO; electron beam lithography; feature-controlled nanotube arrays; hydrothermal method; optoelectronics applications; patterned apertures; random substrates; two-dimensional periodic polymer aperture arrays; Apertures; Lithography; Nanostructures; Photonics; Polymers; Size control; Substrates; Surface morphology; Temperature; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2008. NANO '08. 8th IEEE Conference on
  • Conference_Location
    Arlington, TX
  • Print_ISBN
    978-1-4244-2103-9
  • Electronic_ISBN
    978-1-4244-2104-6
  • Type

    conf

  • DOI
    10.1109/NANO.2008.53
  • Filename
    4617035