• DocumentCode
    2738162
  • Title

    The mechanical behavior investigation of MEMS switches for millimeter wave phase shifters

  • Author

    He, Xun-jun ; Wu, Qun ; Jin, Bo-shi ; Song, Ming-Xin ; Yin, Jing-Hua

  • Author_Institution
    Harbin Inst. of Technol., Harbin
  • fYear
    2006
  • fDate
    18-22 Sept. 2006
  • Firstpage
    235
  • Lastpage
    235
  • Abstract
    In this paper, a novel low spring constant hinge beam structure is presented in order to reduce the driven-voltage of switch. The mechanical behaviors of switches are investigated using the IntelliSuiteTM tool. The simulation results show that the driven voltage of 2.5V and the time response of 30us are obtained respectively. Moreover, the frequencies of all mechanical vibrant modes of beam are higher than 15 kHz.
  • Keywords
    microswitches; millimetre wave phase shifters; IntelliSuite tool; MEMS switches; driven-voltage; hinge beam structure; low spring constant; mechanical behavior; millimeter wave phase shifters; time 30 mus; voltage 2.5 V; Delay; Fasteners; Microswitches; Millimeter wave technology; Millimeter wave transistors; Phase shifters; Radiofrequency microelectromechanical systems; Switches; Time factors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, 2006. IRMMW-THz 2006. Joint 31st International Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    1-4244-0400-2
  • Electronic_ISBN
    1-4244-0400-2
  • Type

    conf

  • DOI
    10.1109/ICIMW.2006.368443
  • Filename
    4222177
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2738162