Title :
Depth-modulated Buried Channel Waveguides By Direct-write Focussed Ion Beam Irradiation
Author :
von Bibra, M.L. ; Roberts, A. ; Dorothy, S.
Author_Institution :
University of Melbourne
Keywords :
Ion beams; Optical attenuators; Optical device fabrication; Optical films; Optical refraction; Optical waveguides; Protons; Silicon compounds; Substrates; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-3889-8
DOI :
10.1109/CLEOPR.1997.610925