A Thin, Vertical, Parallel Plate Capacitor with Multi-Wall Carbon Nanotube Electrodes

We propose a new capacitor structure which uses carbon nanotube electrodes and is suitable for use in advanced integrated circuit technologies. Metallic carbon nanotubes have characteristics which make them well suited for capacitor electrodes (low resistance and large surface area per unit volume). We demonstrate that our thin vertical plate carbon nanotube capacitor can exhibit a capacitance per unit area of 175 fF/mum².