Title :
Pulsed Laser Deposition Of Diamond-like Carbon Film With XeCl Laser
Author_Institution :
Northwest Institute of Nuclear Technology, China
Keywords :
Diamond-like carbon; Gallium nitride; Lithography; Optical films; Optical pulses; Pulsed laser deposition; Substrates; Writing; X-ray diffraction; Zinc oxide;
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-3889-8
DOI :
10.1109/CLEOPR.1997.610947
