DocumentCode
2738579
Title
Development And Applications Of A Laser Writing Lithography System With Alignment Capability
Author
Feng-Lan Xu ; Chi-Yi Liaw ; Yuen-Chuen Chan ; Yan Zhou ; Yee-Loy Lam
Author_Institution
Nanyang Technological University,
fYear
1997
fDate
14-18 July 1997
Firstpage
263
Lastpage
264
Keywords
Diamond-like carbon; Gallium nitride; Laser applications; Lithography; Optical films; Optical pulses; Pulsed laser deposition; Substrates; Writing; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-3889-8
Type
conf
DOI
10.1109/CLEOPR.1997.610948
Filename
610948
Link To Document