Title :
Direct Writing And Characterization Of Low Resistance Aluminum Line On Aluminum Nitride Ceramics With Tea CO Iaser
Author :
Yabe, Hiroyuki ; Taakahashi, Akihisa ; Obara, Minoru
Author_Institution :
Keio University
Keywords :
Aluminum nitride; Ceramics; Conductors; Electric resistance; Gas lasers; Laser theory; Optical pulses; Pulse circuits; Thermal resistance; Writing;
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-3889-8
DOI :
10.1109/CLEOPR.1997.610949