The Extraction of Dielectric Constant by Using the Metal Insulator Metal Capacitor for the Substrate Material

Author

Hsieh, Tsun-Lung ; Jong, Gwo-Jia ; Wu, Chih-Wei ; Lee, Tsung-Lun ; Huang, Ya-Wen

Author_Institution

Electr. Lab., Adv. Semicond. Eng., Inc., Kaohsiung

fYear

2008

fDate

22-24 Oct. 2008

Firstpage

75

Lastpage

77

Abstract

In this paper, the substrate is extracted the material characterization for several capacitor patterns. We design some pads and vias by measuring. The substrate material can be extracted unknown dielectric properties. Then, the new packaging have been designed and completed, it is verified the electrical performance by using EM simulator and save cycle time.

Keywords

MIM devices; capacitors; electronics packaging; permittivity; permittivity measurement; substrates; EM simulator; dielectric constant; metal insulator metal capacitor; packaging design; pad design; substrate material; via design; Capacitors; Dielectric constant; Dielectric materials; Dielectric measurements; Dielectric substrates; Dielectrics and electrical insulation; Frequency; Inorganic materials; Metal-insulator structures; Scattering parameters;

fLanguage

English

Publisher

ieee

Conference_Titel

Microsystems, Packaging, Assembly & Circuits Technology Conference, 2008. IMPACT 2008. 3rd International

Conference_Location

Taipei

Print_ISBN

978-1-4244-3623-1

Electronic_ISBN

978-1-4244-3624-8

Type

conf

DOI

10.1109/IMPACT.2008.4783811

Filename

4783811