Title :
The Extraction of Dielectric Constant by Using the Metal Insulator Metal Capacitor for the Substrate Material
Author :
Hsieh, Tsun-Lung ; Jong, Gwo-Jia ; Wu, Chih-Wei ; Lee, Tsung-Lun ; Huang, Ya-Wen
Author_Institution :
Electr. Lab., Adv. Semicond. Eng., Inc., Kaohsiung
Abstract :
In this paper, the substrate is extracted the material characterization for several capacitor patterns. We design some pads and vias by measuring. The substrate material can be extracted unknown dielectric properties. Then, the new packaging have been designed and completed, it is verified the electrical performance by using EM simulator and save cycle time.
Keywords :
MIM devices; capacitors; electronics packaging; permittivity; permittivity measurement; substrates; EM simulator; dielectric constant; metal insulator metal capacitor; packaging design; pad design; substrate material; via design; Capacitors; Dielectric constant; Dielectric materials; Dielectric measurements; Dielectric substrates; Dielectrics and electrical insulation; Frequency; Inorganic materials; Metal-insulator structures; Scattering parameters;
Conference_Titel :
Microsystems, Packaging, Assembly & Circuits Technology Conference, 2008. IMPACT 2008. 3rd International
Conference_Location :
Taipei
Print_ISBN :
978-1-4244-3623-1
Electronic_ISBN :
978-1-4244-3624-8
DOI :
10.1109/IMPACT.2008.4783811
