• DocumentCode
    2738979
  • Title

    Aligned silicon nanowire arrays for achieving black nonreflecting silicon surface

  • Author

    Hung, Yung-Jr ; Wu, Kai-Chung ; Lee, San-Liang ; Pan, Yen-Ting

  • Author_Institution
    Dept. of Electron. Eng., Nat. Taiwan Univ. of Sci. & Technol., Taipei, Taiwan
  • fYear
    2011
  • fDate
    10-12 Jan. 2011
  • Firstpage
    61
  • Lastpage
    62
  • Abstract
    A new fabrication process, which includes deposition of thin silver film on silicon surface prior to wet etching, is proposed for realizing aligned silicon nanowires with high uniformity, resulting in black nonreflecting silicon surface.
  • Keywords
    elemental semiconductors; etching; metallic thin films; nanofabrication; nanowires; optical fabrication; optical films; semiconductor quantum wires; silicon; silver; Ag-Si; Si; aligned silicon nanowire arrays; black nonreflecting silicon surface; optical fabrication; thin silver film; wet etching; Fabrication; Films; Silicon; Silver; Wet etching; metal-induced Si etching; silicon nanowire array;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Winter Topicals (WTM), 2011 IEEE
  • Conference_Location
    Keystone, CO
  • Print_ISBN
    978-1-4244-8428-7
  • Type

    conf

  • DOI
    10.1109/PHOTWTM.2011.5730046
  • Filename
    5730046
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2738979