Integrated 3-D Simulation Tool for Micro and Nano Fabrication

This paper introduces an integrated 3-D simulation and visualization environment for Micro/Nano fabrication processes. From the nanostructures in several hundred nanometers to micro devices, most available fabrication processes, e.g., lithography, dry/wet etching, CVD/EVD, have been modeled and can be simulated seamlessly with each other under the uniform voxel-based representation method and standardized layout file. Also, physical-based and sophisticated-based simulations have been implemented together as well. High quality simulation and visualization algorithm enhance the reliability.