DocumentCode :
2739406
Title :
Optimization Of Parameters Of Double-pulse Excimer Laser Irradiation For Formation Of Deeply Doped Layer In Silicon
Author :
Jyumonji, Masayuki ; Takai, Hiroshi ; Sugioka, Koji ; Toyoda, Koichi
Author_Institution :
Tokyo University
fYear :
1997
fDate :
14-18 July 1997
Firstpage :
296
Lastpage :
297
Keywords :
Doping; Laser beams; Optical pulses; Pulse measurements; Rough surfaces; Space vector pulse width modulation; Surface emitting lasers; Surface morphology; Surface roughness; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-3889-8
Type :
conf
DOI :
10.1109/CLEOPR.1997.610998
Filename :
610998
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2739406
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