Title :
Evaluation of magnetic field from varied permutation power transmission line at high technology nano-Fab
Author :
Song, Yu-Lin ; Yu, Chwen ; Chuang, Feng-Chang ; Tseng, Ying-Cheng ; Zou, Jyun-Yu ; Shsu, Sen-Gui ; Ma, Tzyh-Ghuang ; Wu, Tzong-Lin ; Chang, Luh-Maan
Author_Institution :
Yen Tjing Ling Ind. Res. Inst., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
We present optimal permutation of power transmission lines to reduce electro-magnetic influence at high technology nano-Fab. In this study, the magnetic field was lessened by mirror array power cable system, and simulation of results predicted the best permutations to decrease electromagnetic influence (EMI) value below 0.4 mG at working space without any shielding. Furthermore, this innovative method will cost down at high technology nano-Fab especially for 28 nanometer process.
Keywords :
electromagnetic interference; foundries; mirrors; nanotechnology; power cables; power transmission lines; electromagnetic influence; high technology nanofab; magnetic field evaluation; mirror array power cable system; permutation power transmission line; semiconductor foundry; size 28 nm; Clocks; Electromagnetic interference; Magnetic field measurement; Magnetic fields; Noise; Power cables; Electromagnetic influence; Magnetic filed; Optimal permutation; Three phase electric power;
Conference_Titel :
Power Electronics Systems and Applications (PESA), 2011 4th International Conference on
Conference_Location :
Hong Kong
Print_ISBN :
978-1-4577-0205-1
DOI :
10.1109/PESA.2011.5982953
