The Integration of Molecular Electronic Devices with Traditional CMOS Technologies

This work describes the development of hybrid circuits composed of silicon-based molecular electronic devices and traditional CMOS technology. In the development of these circuits, we first fabricated individual CMOS-compatible molecular electronic devices and established their effectiveness. We then designed and used traditional VLSI tools to layout a hybrid circuit that includes CMOS for the on-chip characterization of the molecular devices, as well as a platform composed of the contacts and interconnects for the molecular electronic devices. Finally, we developed the procedures for the post-processing fabrication of the molecular electronic devices based on CMOS-compatible techniques. This work is an important step towards the realization of hybrid molecular/traditional circuits. It both advances novel "beyond CMOS" molecular electronic technology, and enables hybrid circuits for the on-chip characterization of the molecular electronic devices via CMOS instrumentation.