Title :
128 Channels of Integrated Filter Array in the NIR Region Fabricated by Using The Combinatorial Deposition Technique
Author :
Shao-Wei Wang ; Li, Ming ; Changsheng Xia ; Haiqian Wang ; Chen, Xiaoshuang ; Wei Lu
Author_Institution :
Shanghai Inst. of Tech. Phys., Shanghai
Abstract :
A combinatorial deposition technique is developed to fabricate integrated narrow bandpass filters (NBPFs) on a single substrate. It is highly efficient for the fabrication of integrated filter arrays in optical regions. An array integrated with 128 NBPFs has been fabricated by using the technique with only a nine-step deposition process. The pass-bands of the filters distribute almost linearly in the range of 722.0-880.0 nm. Their relative bandwidth is smaller than 0.44%.
Keywords :
band-pass filters; integrated optics; optical arrays; optical fabrication; optical filters; NIR region; combinatorial deposition technique; integrated filter array; integrated narrow bandpass filters; nine step deposition process; wavelength 722 nm to 880 nm; Band pass filters; Bandwidth; Etching; Filter bank; Integrated optics; Optical arrays; Optical filters; Optical refraction; Optical variables control; Physics;
Conference_Titel :
Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, 2006. IRMMW-THz 2006. Joint 31st International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0400-2
Electronic_ISBN :
1-4244-0400-2
DOI :
10.1109/ICIMW.2006.368558
