Title :
Design and fabrication of HOE for clock distribution in integrated circuits
Author :
Prongue, D. ; Herzig, H.P.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Abstract :
The authors present the design and fabrication of HOE for clock distribution. The set-up consists of a HOE imaging a source (semiconductor laser) onto multiple photodetectors in an integrated circuit. They have studied and fabricated a multi-focus doublet HOE. The aberrations due to the wavelength shift between recording (λ-488 nm) and reconstruction (λ=780 nm) have been minimized by an appropriate recording and readout geometry. The diffraction efficiency has been optimized by a copying technique
Keywords :
aberrations; holographic optical elements; integrated optoelectronics; optical interconnections; 488 nm; 780 nm; aberrations; design; diffraction efficiency; distribution; fabrication; holographic optical element; integrated circuit; integrated circuits; interconnect; multiple photodetectors; semiconductor laser; wavelength shift;
Conference_Titel :
Holographic Systems, Components and Applications, 1989., Second International Conference on
Conference_Location :
Bath
