Title :
Photoluminescence from GaN implanted with isoelectronic phosphorus and bismuth
Author :
Jadwisienczak, W.M. ; Lozykowski, H.J.
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Ohio Univ., Athens, OH, USA
Abstract :
Photoluminescence spectra, excitation spectra and decay kinetics of epitaxial GaN layers grown by MOCVD on sapphire substrates and implanted by isoelectronic impurities P and Bi were investigated. Post implant annealing up to 1150°C, and different duration time was done in a tube furnace under flowing NH3 or N2 using proximity cap method to recover implantation damages. The PL of GaN:P shows strong emission peaked at 423 nm-428 nm with modulated structures that depend on annealing condition. The PL of GaN: Bi shows luminescence transitions, observable in a wide temperature range from 9 K to 300 K. Further, we develop the luminescence models that describe the recombination and quenching processes
Keywords :
CVD coatings; III-V semiconductors; annealing; bismuth; gallium compounds; ion implantation; phosphorus; photoluminescence; semiconductor epitaxial layers; wide band gap semiconductors; 9 to 300 K; GaN:Bi; GaN:P; MOCVD; annealing; decay kinetics; epitaxial GaN layers; excitation spectra; isoelectronic impurities; photoluminescence; proximity cap method; quenching; recombination; sapphire substrates; Annealing; Bismuth; Gallium nitride; Implants; Impurities; Kinetic theory; Luminescence; MOCVD; Photoluminescence; Substrates;
Conference_Titel :
Compound Semiconductors, 1997 IEEE International Symposium on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7503-0556-8
DOI :
10.1109/ISCS.1998.711633