Title :
An impact of GIDL off leakage on low-power sub-0.2 μm SOI CMOS applications
Author :
Kotani, Naoki ; Ito, Satoru ; Yasui, Takatoshi ; Hori, Toshikazu
Author_Institution :
Center for Process Technol. Dev., Matsushita Electron. Corp., Kyoto, Japan
Abstract :
The speed advantage of SOI CMOSFETs has exclusively been claimed for front-end applications (Ajmera et al, 1999), but its potential for low-power applications has rarely been discussed. Recently, it was reported that BF (body floating)-enhanced short-channel effects increase Vt-limited off leakage, for which Vt must be larger than bulk CMOS, thus resulting in no performance merit in the sub-0.2 μm class (Chau et al, 1997). In this paper, we analyze the off leakage current Ioff and aim to suppress Ioff to the bulk level for low-power applications (Ioff level ~10 -11 A/μm). In such a low Ioff regime, sub-0.2 μm SOI has been found to suffer from another Ioff component, i.e. GIDL (gate-induced drain leakage), especially for nMOSFETs. We show that lowering Vdd is very effective to reduce GIDL to a comparable level with bulk CMOS while still retaining a speed advantage and dynamic-power reduction
Keywords :
CMOS integrated circuits; MOSFET; buried layers; integrated circuit measurement; leakage currents; low-power electronics; silicon-on-insulator; 0.2 micron; BF-enhanced short-channel effects; GIDL; GIDL off leakage; SOI; SOI CMOSFETs; Si-SiO2; body floating-enhanced short-channel effects; bulk CMOS; dynamic-power reduction; front-end applications; gate-induced drain leakage; low-power SOI CMOS applications; low-power applications; nMOSFETs; off leakage current; performance merit; threshold-limited off leakage; CMOS process; CMOS technology; CMOSFETs; Cobalt; Doping; Electrical resistance measurement; FETs; Indium tin oxide; Leakage current; MOSFETs;
Conference_Titel :
SOI Conference, 2000 IEEE International
Conference_Location :
Wakefield, MA
Print_ISBN :
0-7803-6389-2
DOI :
10.1109/SOI.2000.892784