DocumentCode
2741257
Title
An impact of GIDL off leakage on low-power sub-0.2 μm SOI CMOS applications
Author
Kotani, Naoki ; Ito, Satoru ; Yasui, Takatoshi ; Hori, Toshikazu
Author_Institution
Center for Process Technol. Dev., Matsushita Electron. Corp., Kyoto, Japan
fYear
2000
fDate
2000
Firstpage
90
Lastpage
91
Abstract
The speed advantage of SOI CMOSFETs has exclusively been claimed for front-end applications (Ajmera et al, 1999), but its potential for low-power applications has rarely been discussed. Recently, it was reported that BF (body floating)-enhanced short-channel effects increase Vt-limited off leakage, for which Vt must be larger than bulk CMOS, thus resulting in no performance merit in the sub-0.2 μm class (Chau et al, 1997). In this paper, we analyze the off leakage current Ioff and aim to suppress Ioff to the bulk level for low-power applications (Ioff level ~10 -11 A/μm). In such a low Ioff regime, sub-0.2 μm SOI has been found to suffer from another Ioff component, i.e. GIDL (gate-induced drain leakage), especially for nMOSFETs. We show that lowering Vdd is very effective to reduce GIDL to a comparable level with bulk CMOS while still retaining a speed advantage and dynamic-power reduction
Keywords
CMOS integrated circuits; MOSFET; buried layers; integrated circuit measurement; leakage currents; low-power electronics; silicon-on-insulator; 0.2 micron; BF-enhanced short-channel effects; GIDL; GIDL off leakage; SOI; SOI CMOSFETs; Si-SiO2; body floating-enhanced short-channel effects; bulk CMOS; dynamic-power reduction; front-end applications; gate-induced drain leakage; low-power SOI CMOS applications; low-power applications; nMOSFETs; off leakage current; performance merit; threshold-limited off leakage; CMOS process; CMOS technology; CMOSFETs; Cobalt; Doping; Electrical resistance measurement; FETs; Indium tin oxide; Leakage current; MOSFETs;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference, 2000 IEEE International
Conference_Location
Wakefield, MA
ISSN
1078-621X
Print_ISBN
0-7803-6389-2
Type
conf
DOI
10.1109/SOI.2000.892784
Filename
892784
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