Automatic Tool Changer for SPMs

Author

Neitzel, Mattias ; Schmucker, Ulrich ; Zubtsov, Mikhail

Author_Institution

Fraunhofer Inst. for Factory Oper. & Autom., Magdeburg

fYear

2008

fDate

18-21 Aug. 2008

Firstpage

849

Lastpage

850

Abstract

Our research encompasses improvements in SPM instrumentation needed for rapid automated change of nano- working tools like cantilever chips or grippers in the immediate region of SEM or FIB field of view. The major challenges are utmost precision working-tool positioning, repeatable clamping of the tool and placing the working-part in the same point after tool´s change, and devising a design which will not incapacitate SEM or FIB for work. The communication presents an entirely new approach with the promise to meet these demands.

Keywords

focused ion beam technology; machine tools; nanotechnology; scanning electron microscopy; scanning probe microscopy; self-assembly; FIB field of view; SEM field of view; SPM instrumentation; automatic tool changer; cantilever chips; grippers; nanoworking tools; precision working-tool positioning; rapid automated change; repeatable tool clamping; Atomic force microscopy; Chemical processes; Clamps; Force measurement; Nanoparticles; Nanostructures; Production; Robotic assembly; Scanning electron microscopy; Scanning probe microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2008. NANO '08. 8th IEEE Conference on

Conference_Location

Arlington, TX

Print_ISBN

978-1-4244-2103-9

Electronic_ISBN

978-1-4244-2104-6

Type

conf

DOI

10.1109/NANO.2008.253

Filename

4617235