24-28 GHz Gyrotron-based Sources for Technological Applications

Author

Denisov, G. ; Bykov, Yu. ; Eremeev, A. ; Kholoptsev, V. ; Glyavin, M. ; Luchinin, A. ; Kalynova, G. ; Plotnikov, I.

Author_Institution

Russian Acad. of Sci., Nizhny Novgorod

fYear

2006

fDate

18-22 Sept. 2006

Firstpage

500

Lastpage

500

Abstract

A design of gyrotron-based systems and examples of their applications are presented. The field of application of the millimeter-wave (mm-wave) energy extends considerably in the last years. Several models of the 24 -28 GHz gyrotron-based systems ranging from 3 to 15 kW in continuous wave power have been recently developed by the Institute of Applied Physics. The design of these systems is presented. Examples of their use for materials processing, production of ion beams, and mm-wave plasma assisted chemical vapor deposition are given.

Keywords

gyrotrons; ion beams; millimetre wave generation; millimetre wave tubes; frequency 24 GHz to 28 GHz; gyrotron sources; ion beams production; materials processing; millimeter-wave sources; plasma assisted chemical vapor deposition; power 3 kW to 15 kW; technological application; Ceramics; Chemical vapor deposition; Frequency; Gyrotrons; Millimeter wave technology; Physics; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma sources;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, 2006. IRMMW-THz 2006. Joint 31st International Conference on

Conference_Location

Shanghai

Print_ISBN

1-4244-0400-2

Electronic_ISBN

1-4244-0400-2

Type

conf

DOI

10.1109/ICIMW.2006.368708

Filename

4222442