Large scale circuit applications of SOI

Summary form only given, as follows. Silicon-on insulator (SOI) has been advertised as the next-generation technology for both radiation hardened and commercial large-scale ICs several years. Realization of the promises of this technology, particularly for large-scale circuits, has made slower progress than was at one time envisioned. Recent advances, however, in both the processing and materials aspects of the technology has significantly increased the chances of volume manufacturing of SOI devices. The recent advances which have been made in SOI materials and process technology, that have a direct impact on large-scale circuit application are discussed. The disadvantages and remaining hurdles which must be overcome to allow volume applications of SOI are also considered