Title :
C3DSTAR: a 3D wiring capacitance calculator
Author :
Janak, J.F. ; Ling, D.D. ; Huang, H.-M.
Author_Institution :
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
Abstract :
A description is given of C3DSTAR, a capacitance program for three-dimensional configurations of conductors and dielectrics, that incorporates a hybrid integral-equation solution of the capacitance problem. The hybrid method combines the use of multilayer Green´s function treatment of the infinite planar dielectric interfaces with an explicit treatment of the bound charge at finite and/or irregular dielectric interfaces. The approach described differs from previous hybrid integral equation methods in that the free charge density is the primary unknown, rather than the total charge density. This allows early elimination of numerically induced asymmetry in the capacitance matrix and results in more accurate capacitive values.<>
Keywords :
Green´s function methods; capacitance; circuit analysis computing; delays; integral equations; integrated circuit technology; 3D wiring capacitance calculator; C3DSTAR; RC delays; bound charge; capacitance matrix; hybrid integral-equation solution; infinite planar dielectric interfaces; irregular dielectric interfaces; multilayer Green´s function; three-dimensional configurations; Capacitance; Circuits; Delay; Dielectrics; Geometry; Hardware; Packaging; Semiconductor device measurement; Transistors; Wiring;
Conference_Titel :
Computer-Aided Design, 1989. ICCAD-89. Digest of Technical Papers., 1989 IEEE International Conference on
Conference_Location :
Santa Clara, CA, USA
Print_ISBN :
0-8186-1986-4
DOI :
10.1109/ICCAD.1989.77006