A batch-manufacturable uniform current density metallic-shell hemispherical microelectrode

In this paper, we report on the simulation results for a batch-manufacturable uniform current density metallic-shell hemispherical microelectrode. These electrodes can be used for safe stimulation of neurons or neuromuscular junctions in a variety of research and clinical (neural prostheses) settings. Maxwell 3D™ software package was used to simulate several microelectrode structures capable of providing a uniform current density profile. These included recessed planar, solid-metallic and metallic-shell hemispherical microelectrodes. Simulation results showed no significant difference between the solid metallic and metallic-shell hemispherical electrodes with the latter being more compatible with the integrated circuit and MEMS microfabrication technologies. In addition, both hemispherical microelectrodes yield improved current density distribution and profile compared with the recessed planar electrode.