Title :
Study terahertz ellipsometry setups for measuring metals and dielectrics using free electron laser light source
Author_Institution :
Russian Acad. of Sci., Novosibirsk
Abstract :
The ellipsometers for terahertz spectral range with free electron laser light source was constructed. Different schemes were compared, describing the sensitivity with analyzing measurement error. Setups were numerically simulated and compared with experiments. Terahertz ellipsometry spectra´s for water based liquids, and dielectrics (PMMA, teflon, silicon) were obtained. Some optical constants (thickness, absorption, refractive indexes) were calculated from measurements.
Keywords :
absorption coefficients; dielectric materials; elemental semiconductors; ellipsometry; free electron lasers; polymers; refractive index; silicon; submillimetre wave spectra; PMMA; Si; dielectrics; free electron laser light source; measurement error analysis; numerical simulation; optical constants; refractive indexes; silicon; teflon; terahertz ellipsometry; terahertz spectral range; water based liquids; Dielectric liquids; Dielectric measurements; Ellipsometry; Error analysis; Free electron lasers; Light sources; Measurement errors; Numerical simulation; Silicon; Submillimeter wave measurements;
Conference_Titel :
Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, 2006. IRMMW-THz 2006. Joint 31st International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0400-2
Electronic_ISBN :
1-4244-0400-2
DOI :
10.1109/ICIMW.2006.368761
