Implantable biaxial piezoresistive accelerometer for sensorimotor control

This paper describes the design, fabrication and test results of a novel biaxial piezoresistive accelerometer and its incorporation into a miniature neuromuscular stimulator called a BION™. Because of its highly symmetric twin mass structure, the X and Z axis acceleration can be measured at the same time and the cross axis sensitivity can be minimized by proper piezoresistor design. The X and Z axis sensitivities of the biaxial accelerometer are 0.10 mV/g/V and 1.40 mV/g/V, respectively, which are further increased to 0.65 mV/g/V and 2.40 mV/g/V, respectively, with extra silicon mass added to the proof mass. The cross-axis sensitivity is less than 3.3% among X, Y and Z-axis. An orientation tracking method for human segments by measuring every joint angle is also discussed in this paper. Joint angles can be obtained by processing the outputs of a pair of biaxial accelerometers (placed very close to the joint axis on the adjacent limb links), without having to integrate acceleration or velocity signals, thereby avoiding errors due to offsets and drift.