• DocumentCode
    2744135
  • Title

    All-silicon plate wave oscillator system for sensor applications

  • Author

    Vellekoop, M.J. ; van Rhijn, A.J. ; Lubking, G.W. ; Venema, A.

  • Author_Institution
    Delft Univ. of Technol., Netherlands
  • fYear
    1990
  • fDate
    4-7 Dec 1990
  • Firstpage
    275
  • Abstract
    The authors present the design and realization of an all-silicon acoustic plate wave oscillator system for sensor applications. The plate wave device and the electronic circuitry have been fabricated in two separate silicon chips. The plate wave device embodies a silicon membrane covered with piezoelectric zinc oxide. For protection of the zinc oxide, a thin silicon nitride layer is deposited on top
  • Keywords
    acoustoelectric devices; crystal resonators; electric sensing devices; elemental semiconductors; silicon; surface acoustic wave devices; Si-SiO2-ZnO-Si3N4; all Si plate; design; plate wave oscillator system; sensor applications; Acoustic applications; Acoustic devices; Acoustic sensors; Acoustic waves; Biomembranes; Circuits; Oscillators; Sensor systems and applications; Silicon; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1990. Proceedings., IEEE 1990
  • Conference_Location
    Honolulu, HI
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1990.171367
  • Filename
    171367
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2744135