Electrothermal Model of a MEM Gas Sensor

Author

Fuentes, A. Tavira ; Barranca, A. Reyes ; Vidal, J. L Gonzalez

Author_Institution

Dept. of Electr. Eng., CINVESTAV-IPN, Mexico City

fYear

2006

fDate

6-8 Sept. 2006

Firstpage

1

Lastpage

5

Abstract

In this paper, the electrothermal model of a microelectromechanical (MEM) gas sensor is presented, as well as a simulation approach that computes the transient state electro-thermal behavior of MEM gas sensor and that it is compatible with the model used in discrete devices, using commercial circuit simulators (e.g., SPICE). Furthermore, the resulting values of the current magnitude, that it should be applied to the microhotplate (MHP) to reach the necessary level of temperature to activate the sensing mechanism, are presented. The results are based on the solution of the system of equations that governs the heat transport in the device

Keywords

gas sensors; micromechanical devices; MEM gas sensor; MHP; discrete device; electrothermal model; microelectromechanical; microhotplate; sensing mechanism; transient state behavior; Circuit simulation; Electrothermal effects; Equations; Gas detectors; Heat transfer; Isolation technology; SPICE; Temperature control; Temperature sensors; Zinc oxide; Heat Transfer; MEM; MHP; Microheater; Transient;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Electronics Engineering, 2006 3rd International Conference on

Conference_Location

Veracruz

Print_ISBN

1-4244-0402-9

Electronic_ISBN

1-4244-0403-7

Type

conf

DOI

10.1109/ICEEE.2006.251903

Filename

4017988