DocumentCode :
2745353
Title :
A Novel Stacked Capacitor With Porous-Si Electrodes For High Density DRAMs
Author :
Watanabe, H. ; Honma, I. ; Ohnishi, S. ; Kitajima, H.
Author_Institution :
NEC Corporation
fYear :
1993
fDate :
17-19 May 1993
Firstpage :
17
Lastpage :
18
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
Conference_Location :
Kyoto, Japan
Type :
conf
DOI :
10.1109/VLSIT.1993.760223
Filename :
760223
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2745353
