DocumentCode

2745353

Title

A Novel Stacked Capacitor With Porous-Si Electrodes For High Density DRAMs

Author

Watanabe, H. ; Honma, I. ; Ohnishi, S. ; Kitajima, H.

Author_Institution

NEC Corporation

fYear

1993

fDate

17-19 May 1993

Firstpage

17

Lastpage

18

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location

Kyoto, Japan

Type

conf

DOI

10.1109/VLSIT.1993.760223

Filename

760223