Title :
Measurement of acoustic properties of liquids using SH-type surface acoustic waves
Author :
Nomura, Tooru ; Yasuda, Tsutomu
Author_Institution :
Dept. of Electr. Commun., Shibaura Inst. of Technol., Tokyo, Japan
Abstract :
A surface acoustic wave (SAW) viscosity sensor for liquid phase sensing utilizing a shear horizontal displacement of a leaky SAW is presented. The sensor is based on a dual SAW delay line oscillator. Leaky SAWs with shear horizontal displacement were excited on a 41°-rotated Y-cut X-propagation LiNbO3 substrate by using interdigital transducers (IDTs). It is shown that the viscosity sensor has a sensitivity of about 80 Hz/cP at an operating frequency of 30 MHz, with a threshold sensitivity of about 1 cP
Keywords :
crystal resonators; detectors; surface acoustic wave devices; ultrasonic delay lines; ultrasonic measurement; viscosity measurement; 30 MHz; LiNbO3 substrate; SAW viscosity sensor; SH-type surface acoustic waves; Y-cut X-propagation; acoustic properties measurement; dual SAW delay line oscillator; interdigital transducers; leaky SAW; liquid phase sensing; shear horizontal displacement; Acoustic measurements; Acoustic sensors; Acoustic waves; Delay lines; Frequency; Liquids; Oscillators; Surface acoustic waves; Transducers; Viscosity;
Conference_Titel :
Ultrasonics Symposium, 1990. Proceedings., IEEE 1990
Conference_Location :
Honolulu, HI
DOI :
10.1109/ULTSYM.1990.171374
