Title :
Gas-sensing characteristics of ruthenium-doped SnO2 thin films in a propane atmosphere
Author :
Aguilar-Leyva, Jaime ; Maldonado, A. ; Olvera, M. de la L
Author_Institution :
Dept. de Ingenieria Electrica, CINVESTAV-IPN, Mexico City
Abstract :
We present results about the preparation and characterization of ruthenium doped-tin oxide (SnO2:Ru) thin films in a controlled atmosphere containing gas propane (C3H8) at different operation temperatures. The SnO2:Ru thin films were deposited by the spray pyrolysis technique onto soda-lime glass substrates. The effect of the addition of [Ru/Zn]=1 at. % to the SnO2 films, the operation and deposition temperatures, the propane concentration, and the annealing-time (vacuum at 400degC, time=1 or 2 h) on the films sensitivity has been studied. Two-hour sintered SnO2:Ru (1%) thin films, with a thickness on the order of 70 nm, measured at 300degC in a propane atmosphere of 500 ppm gave rise to the highest sensitivity registered in this work, ~8
Keywords :
annealing; gas sensors; ruthenium; sintering; spray coatings; thin film sensors; thin films; tin compounds; 300 C; 400 C; C3H8; SnO2:Ru; gas propane; gas-sensing characteristics; propane atmosphere; propane concentration; ruthenium-doped tin oxide thin films; soda-lime glass substrates; spray pyrolysis technique; two-hour sintered thin films; Annealing; Atmosphere; Atmospheric measurements; Glass; Spraying; Sputtering; Temperature control; Temperature sensors; Thickness measurement; Transistors; Gas Sensors; Propane Sensors; Ruthenium-doped tin oxide; Tin oxide;
Conference_Titel :
Electrical and Electronics Engineering, 2006 3rd International Conference on
Conference_Location :
Veracruz
Print_ISBN :
1-4244-0402-9
Electronic_ISBN :
1-4244-0403-7
DOI :
10.1109/ICEEE.2006.251940
