Title :
A New Capacitance Measurement Method For Lateral Diffusion Profiles In MOSFET´s With Extremely Short Overlap Regions
Author :
Uchida, H. ; Kajita, Y. ; Fukuda, K. ; Ida, J. ; Hirasbita ; Nishi, K.
Author_Institution :
Oki Electric Industry Co.,LTD.
Conference_Titel :
VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
Conference_Location :
Kyoto, Japan
DOI :
10.1109/VLSIT.1993.760234
