Title :
High-speed vapor phase axial deposition using a newly developed triple-flame torch
Author :
Ito, Masumi ; Takagi, Masahiro ; Danzuka, Toshio ; Yokota, Hiroshi ; Watanabe, Minoru
Author_Institution :
Sumitomo Electric Ind. Ltd., Yokohama, Japan
Abstract :
The flame flow in the vapor phase deposition was analyzed using computer simulation and light scattering method. By a newly developed triple-flame torch, a high deposition rate of 21.2 g/min was attained
Keywords :
flames; light scattering; vapour deposition; VAD; computer simulation; flame flow; light scattering; soot deposition; triple-flame torch; vapor phase axial deposition;
Conference_Titel :
Optical Communication, 1988. (ECOC 88). Fourteenth European Conference on (Conf. Publ. No.292)
Conference_Location :
Brighton
