DocumentCode :
2745605
Title :
Ta/sub 2/O/sub 5//TiO/sub 2/ Composite Films For High Density DRAM Capacitors
Author :
Kwon, K.W. ; Kang, C.S. ; Choi, G.H. ; Sun, Y.B. ; Ahn, S.T. ; Lee, M.Y. ; Lee, J.G.
Author_Institution :
Samsung Electronics Co. Ltd.
fYear :
1993
fDate :
17-19 May 1993
Firstpage :
45
Lastpage :
46
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
Conference_Location :
Kyoto, Japan
Type :
conf
DOI :
10.1109/VLSIT.1993.760237
Filename :
760237
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2745605
