• DocumentCode
    2745629
  • Title

    A Novel Metal-Ferroelectric Insulator-Semiconductor (MFS) Capacitor Using PZT/SrTiO3 Layered Insulator

  • Author

    Kashihara, K. ; Okudaira, T. ; Itoh, H. ; Higaki, T. ; Abe, H.

  • Author_Institution
    Mitsubishi Electric Corporation
  • fYear
    1993
  • fDate
    17-19 May 1993
  • Firstpage
    49
  • Lastpage
    50
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
  • Conference_Location
    Kyoto, Japan
  • Type

    conf

  • DOI
    10.1109/VLSIT.1993.760239
  • Filename
    760239