Title :
A Novel Metal-Ferroelectric Insulator-Semiconductor (MFS) Capacitor Using PZT/SrTiO3 Layered Insulator
Author :
Kashihara, K. ; Okudaira, T. ; Itoh, H. ; Higaki, T. ; Abe, H.
Author_Institution :
Mitsubishi Electric Corporation
Conference_Titel :
VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
Conference_Location :
Kyoto, Japan
DOI :
10.1109/VLSIT.1993.760239
