DocumentCode
2745629
Title
A Novel Metal-Ferroelectric Insulator-Semiconductor (MFS) Capacitor Using PZT/SrTiO3 Layered Insulator
Author
Kashihara, K. ; Okudaira, T. ; Itoh, H. ; Higaki, T. ; Abe, H.
Author_Institution
Mitsubishi Electric Corporation
fYear
1993
fDate
17-19 May 1993
Firstpage
49
Lastpage
50
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
Conference_Location
Kyoto, Japan
Type
conf
DOI
10.1109/VLSIT.1993.760239
Filename
760239
Link To Document