• DocumentCode
    2745710
  • Title

    An Ultra-low Thermal-budget SiGe-base Bipolar Technology

  • Author

    Burghartz, J.N. ; Grutzmacher, D.A. ; Sedgwick, T.O. ; Jenkins, K.A. ; Megdanis, A.C. ; Cotte, J.M. ; Nguyen-Ngoc, D. ; Iyer, S.S.

  • Author_Institution
    IBM Semiconductor Research
  • fYear
    1993
  • fDate
    17-19 May 1993
  • Firstpage
    59
  • Lastpage
    60
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
  • Conference_Location
    Kyoto, Japan
  • Type

    conf

  • DOI
    10.1109/VLSIT.1993.760244
  • Filename
    760244
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2745710